RBS and XPS depth-profiling of Ge-nc synthesized from Ge+ implantation in thin SiO2/Si layers.

Julien Demarche, Pierre Louette, D. Barba, Guy G. Ross, Guy Terwagne

Research output: Contribution to conference › Poster › peer-review

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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform