Profile changes and self-sputtering during low energy ion implantation

W Vandervorst, T Janssens, B Brijs, R Lindsay, E Collart, D Kird, Gilles Mathot, Guy Terwagne

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)277-283
    Number of pages7
    JournalMaterial research society symposium proceedings
    Volume77
    Publication statusPublished - 2002

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