Original language | English |
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Pages (from-to) | 277-283 |
Number of pages | 7 |
Journal | Material research society symposium proceedings |
Volume | 77 |
Publication status | Published - 2002 |
Profile changes and self-sputtering during low energy ion implantation
W Vandervorst, T Janssens, B Brijs, R Lindsay, E Collart, D Kird, Gilles Mathot, Guy Terwagne
Research output: Contribution to journal › Article