Process for forming a film on a substrate by reactive sputtering.

Rene Winand (Inventor), Stéphane Lucas (Inventor), Pierre Vanden Brande (Inventor), Alain Weymeersch (Inventor), Lucien Renard (Inventor)

    Research output: Patent

    1 Downloads (Pure)

    Fingerprint Dive into the research topics of 'Process for forming a film on a substrate by reactive sputtering.'. Together they form a unique fingerprint.

    Physics & Astronomy