Abstract
A process for forming a coating on a substrate by condensation of a coating material onto the substrate while the substrate is moving through an enclosure under vacuum in which evaporation of the coating material takes place. With the inventive process, deposits with controlled structure and adhesion can be made on moving substrate or support even at very high speeds, so that the process can advantageously be carried out continuously or at variable speed.
Original language | English |
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Patent number | US2001032782 |
IPC | C23C 14/ 56 A I |
Priority date | 31/01/01 |
Publication status | Published - 25 Oct 2001 |