Pressure sensor based on organic single crystal air-gap transistor

Marco J. Pereira, Cedric Ayela, Lionel Hirsch, Isabelle Dufour, Alejandro Briseno, Micaela Matta, Yoann Olivier, Luca Muccioli, Alfred Crosby, Guillaume Wantz

Research output: Contribution in Book/Catalog/Report/Conference proceedingConference contribution

Abstract

With the development of new technologies, researchers have recently focused their interest on flexible electronics to improve the interaction between users and devices. In this context, integrated ultra-low-pressure sensors remain a technological challenge. Here, we show that organic single crystal-based air-gap transistors fabricated by soft lithography are extremely sensitive to mechanical strain and pressure. When low forces are applied to the suspended semiconducting crystal (rubrene), the gated transistors show that drain currents as output signals are extremely sensitive to the deformations. Incredibly high gauge factors, over 4000, are measured using this technique. Further investigation shows that the contact resistance at the rubrene-gold interface is responsible for the high sensing performances. Such a platform is also able to detect sound waves with high sensitivity, making these simple devices suitable for applications in pressure sensing.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1163-1166
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 26 Jul 2017
Externally publishedYes
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 18 Jun 201722 Jun 2017

Publication series

Name2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Conference

Conference19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period18/06/1722/06/17

Keywords

  • air-gap transistors
  • MEMS
  • organic single crystal
  • pressure sensor
  • Rubrene

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