Optics-free, plasma-based lithography in inorganic resists made up of nanoparticles

Santosh Shaw, Kyle J. Miller, Julien L. Colaux, Ludovico Cademartiri

Research output: Contribution to journalArticlepeer-review

Abstract

We describe a lithographic approach - nanocrystal plasma polymerization-based lithography - in which colloidal nanocrystal assemblies (CNAs) are used as the inorganic resist and, potentially, the active material. The patterning process is based on a change in the dispersibility of the CNAs in solvents as a result of the exposure to plasmas. Plasmas can etch the capping ligands from the exposed area. During the development step, the unexposed area of CNAs is redispersed, leaving behind the patterned area, similar to what is expected from negative photoresist.

Original languageEnglish
Article number031607
JournalJournal of Micro/ Nanolithography, MEMS, and MOEMS
Volume15
Issue number3
DOIs
Publication statusPublished - 1 Jul 2016
Externally publishedYes

Keywords

  • colloids nanoparticles
  • inorganic photoresists
  • low-cost and rapid
  • optics-free lithography
  • plasma
  • self-assembly

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