On the mechanism of the hydrogen-induced exfoliation of silicon

Markus Weldon; Vittorio Marsico; Yves Chabal; A. Agarwal; D. Eaglesham; J. Sapjeta; W. Brown; D. Jacobson; Yves Caudano; Stan Christman; Ed Chaban

On the mechanism of the hydrogen-induced exfoliation of silicon

Markus Weldon, Vittorio Marsico, Yves Chabal, A. Agarwal, D. Eaglesham, J. Sapjeta, W. Brown, D. Jacobson, Yves Caudano, Stan Christman, Ed Chaban

Namur Research Institute for Life Sciences

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1065-1073
Number of pages	9
Journal	Journal of vacuum science and technology B
Volume	15
Publication status	Published - 1997

Access to Document

http://dx.doi.org/10.1116/1.589416

Cite this

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title = "On the mechanism of the hydrogen-induced exfoliation of silicon",

author = "Markus Weldon and Vittorio Marsico and Yves Chabal and A. Agarwal and D. Eaglesham and J. Sapjeta and W. Brown and D. Jacobson and Yves Caudano and Stan Christman and Ed Chaban",

year = "1997",

language = "English",

volume = "15",

pages = "1065--1073",

journal = "Journal of vacuum science and technology B",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - On the mechanism of the hydrogen-induced exfoliation of silicon

AU - Weldon, Markus

AU - Marsico, Vittorio

AU - Chabal, Yves

AU - Agarwal, A.

AU - Eaglesham, D.

AU - Sapjeta, J.

AU - Brown, W.

AU - Jacobson, D.

AU - Caudano, Yves

AU - Christman, Stan

AU - Chaban, Ed

PY - 1997

Y1 - 1997

M3 - Article

VL - 15

SP - 1065

EP - 1073

JO - Journal of vacuum science and technology B

JF - Journal of vacuum science and technology B

ER -