Nitrogen redistribution in annealed LaFeOxNy thin films investigated by FTIR spectroscopy and EELS mapping

Emile Haye, Victor Pierron, Silvère Barrat, Fabien Capon, Frans Munnik, Stéphanie Bruyère

Research output: Contribution to journalArticle

Abstract

LaFeOxNy thin films have been deposited by magnetron sputtering in Ar/O2/N2 gas mixture at 800 °C. Such oxynitride perovskites present a specific infrared vibration mode at 2040 cm−1, due to the presence of nitrogen, which disappears during heating in air. The loss of the vibration mode with temperature has been monitored allowing the determination of an activation energy of thermal degradation of LaFeOxNy. The quantification of nitrogen by Elastic Recoil Detection Analysis (ERDA) before and after heating exhibits the same nitrogen content. Such behavior is due to a nitrogen redistribution observed by Electron Energy Loss Spectroscopy (EELS) mapping, showing migration of nitrogen into grain boundaries, in association with the film oxidation.

LanguageEnglish
Pages1041-1045
Number of pages5
JournalApplied Surface Science
Volume427
DOIs
StatePublished - 1 Jan 2018

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Electron energy loss spectroscopy
Nitrogen
Spectroscopy
Thin films
Heating
Gas mixtures
Magnetron sputtering
Grain boundaries
Pyrolysis
Activation energy
Association reactions
Infrared radiation
Oxidation
Air
Temperature

Keywords

  • EELS mapping
  • FTIR
  • Oxynitride perovskite
  • Thermal stability

Cite this

Haye, Emile ; Pierron, Victor ; Barrat, Silvère ; Capon, Fabien ; Munnik, Frans ; Bruyère, Stéphanie. / Nitrogen redistribution in annealed LaFeOxNy thin films investigated by FTIR spectroscopy and EELS mapping. In: Applied Surface Science. 2018 ; Vol. 427. pp. 1041-1045
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Nitrogen redistribution in annealed LaFeOxNy thin films investigated by FTIR spectroscopy and EELS mapping. / Haye, Emile; Pierron, Victor; Barrat, Silvère; Capon, Fabien; Munnik, Frans; Bruyère, Stéphanie.

In: Applied Surface Science, Vol. 427, 01.01.2018, p. 1041-1045.

Research output: Contribution to journalArticle

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T1 - Nitrogen redistribution in annealed LaFeOxNy thin films investigated by FTIR spectroscopy and EELS mapping

AU - Haye,Emile

AU - Pierron,Victor

AU - Barrat,Silvère

AU - Capon,Fabien

AU - Munnik,Frans

AU - Bruyère,Stéphanie

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AB - LaFeOxNy thin films have been deposited by magnetron sputtering in Ar/O2/N2 gas mixture at 800 °C. Such oxynitride perovskites present a specific infrared vibration mode at 2040 cm−1, due to the presence of nitrogen, which disappears during heating in air. The loss of the vibration mode with temperature has been monitored allowing the determination of an activation energy of thermal degradation of LaFeOxNy. The quantification of nitrogen by Elastic Recoil Detection Analysis (ERDA) before and after heating exhibits the same nitrogen content. Such behavior is due to a nitrogen redistribution observed by Electron Energy Loss Spectroscopy (EELS) mapping, showing migration of nitrogen into grain boundaries, in association with the film oxidation.

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KW - FTIR

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