Molecular depth profiling with reactive ions, or why chemistry matters in sputtering

L. Houssiau, N. Mine

Research output: Contribution to journal › Article › peer-review

1 results
- Title(ascending)

Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform