Original language | French |
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Title of host publication | 4e Journées sur les Nouvelles Tendances en Procédés Magnétron et Arcs pour le Dépôt de Couches Minces |
Subtitle of host publication | Actes des Journées |
Place of Publication | Paris |
Publisher | Société Française du Vide |
Pages | 87-91 |
Number of pages | 5 |
Publication status | Published - 2006 |
Equipment
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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of MaterialsFacility/equipment: Technological Platform