LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural properties

Emile Haye, Stéphanie Bruyère, Erwan André, Pascal Boulet, Silvère Barrat, Fabien Capon, Patrice MISKA, Sylvie MIGOT, Cédric Carteret, Romain Coustel, Christine Gendarme, Sébastien Diliberto, Frans Munnik

Research output: Contribution to journalArticle

Abstract

This paper reports on the first study of the chemical, optical, and structural properties of lanthanum ferrite oxynitride thin films deposited by reactive magnetron sputtering. The thin films were deposited in an Ar/O 2/N 2 mixture as reactive plasma, from two elemental La and Fe targets, at a room and high temperature (25 and 800 °C). The films deposited at room temperature are amorphous and have been flash annealed to crystallize the perovskite. The oxynitride properties were investigated and compared to the oxide films deposited in Ar/O 2 gas mixture. All the oxide and oxynitride films present an orthorhombic structure. However, the nitrogen doping is limited to 1–1.5% and leads to the lattice expansion (4%), the bandgap narrowing, a lower electrical resistivity in range [25–350 °C], and a modification of Infrared and Raman spectra. Electron Energy Loss Spectroscopy measurements clearly show the presence of two nitrogen sites with an “active” intra-granular nitrogen associated to a variation of the physical properties.

Original languageEnglish
Pages (from-to)74-83
Number of pages10
JournalJournal of alloys and Compounds
Volume724
DOIs
Publication statusPublished - 2017

Fingerprint

Perovskite
Structural properties
Nitrogen
Optical properties
Thin films
Lanthanum
Electron energy loss spectroscopy
Reactive sputtering
Gas mixtures
Magnetron sputtering
Oxides
Chemical properties
Oxide films
Ferrite
Raman scattering
Energy gap
Physical properties
Doping (additives)
Infrared radiation
Plasmas

Keywords

  • LaFeO
  • Nitrogen doping
  • Oxynitride perovskite
  • Thin film

Cite this

Haye, Emile ; Bruyère, Stéphanie ; André, Erwan ; Boulet, Pascal ; Barrat, Silvère ; Capon, Fabien ; MISKA, Patrice ; MIGOT, Sylvie ; Carteret, Cédric ; Coustel, Romain ; Gendarme, Christine ; Diliberto, Sébastien ; Munnik, Frans. / LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural properties. In: Journal of alloys and Compounds. 2017 ; Vol. 724. pp. 74-83.
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Haye, E, Bruyère, S, André, E, Boulet, P, Barrat, S, Capon, F, MISKA, P, MIGOT, S, Carteret, C, Coustel, R, Gendarme, C, Diliberto, S & Munnik, F 2017, 'LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural properties', Journal of alloys and Compounds, vol. 724, pp. 74-83. https://doi.org/10.1016/j.jallcom.2017.07.025

LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural properties. / Haye, Emile; Bruyère, Stéphanie; André, Erwan; Boulet, Pascal; Barrat, Silvère; Capon, Fabien; MISKA, Patrice; MIGOT, Sylvie; Carteret, Cédric; Coustel, Romain; Gendarme, Christine; Diliberto, Sébastien; Munnik, Frans.

In: Journal of alloys and Compounds, Vol. 724, 2017, p. 74-83.

Research output: Contribution to journalArticle

TY - JOUR

T1 - LaFeOxNy perovskite thin films: Nitrogen location and its effect on morphological, optical and structural properties

AU - Haye, Emile

AU - Bruyère, Stéphanie

AU - André, Erwan

AU - Boulet, Pascal

AU - Barrat, Silvère

AU - Capon, Fabien

AU - MISKA, Patrice

AU - MIGOT, Sylvie

AU - Carteret, Cédric

AU - Coustel, Romain

AU - Gendarme, Christine

AU - Diliberto, Sébastien

AU - Munnik, Frans

PY - 2017

Y1 - 2017

N2 - This paper reports on the first study of the chemical, optical, and structural properties of lanthanum ferrite oxynitride thin films deposited by reactive magnetron sputtering. The thin films were deposited in an Ar/O 2/N 2 mixture as reactive plasma, from two elemental La and Fe targets, at a room and high temperature (25 and 800 °C). The films deposited at room temperature are amorphous and have been flash annealed to crystallize the perovskite. The oxynitride properties were investigated and compared to the oxide films deposited in Ar/O 2 gas mixture. All the oxide and oxynitride films present an orthorhombic structure. However, the nitrogen doping is limited to 1–1.5% and leads to the lattice expansion (4%), the bandgap narrowing, a lower electrical resistivity in range [25–350 °C], and a modification of Infrared and Raman spectra. Electron Energy Loss Spectroscopy measurements clearly show the presence of two nitrogen sites with an “active” intra-granular nitrogen associated to a variation of the physical properties.

AB - This paper reports on the first study of the chemical, optical, and structural properties of lanthanum ferrite oxynitride thin films deposited by reactive magnetron sputtering. The thin films were deposited in an Ar/O 2/N 2 mixture as reactive plasma, from two elemental La and Fe targets, at a room and high temperature (25 and 800 °C). The films deposited at room temperature are amorphous and have been flash annealed to crystallize the perovskite. The oxynitride properties were investigated and compared to the oxide films deposited in Ar/O 2 gas mixture. All the oxide and oxynitride films present an orthorhombic structure. However, the nitrogen doping is limited to 1–1.5% and leads to the lattice expansion (4%), the bandgap narrowing, a lower electrical resistivity in range [25–350 °C], and a modification of Infrared and Raman spectra. Electron Energy Loss Spectroscopy measurements clearly show the presence of two nitrogen sites with an “active” intra-granular nitrogen associated to a variation of the physical properties.

KW - LaFeO

KW - Nitrogen doping

KW - Oxynitride perovskite

KW - Thin film

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U2 - 10.1016/j.jallcom.2017.07.025

DO - 10.1016/j.jallcom.2017.07.025

M3 - Article

VL - 724

SP - 74

EP - 83

JO - Journal of alloys and Compounds

JF - Journal of alloys and Compounds

SN - 0925-8388

ER -