Fingerprint
Dive into the research topics of 'Kinetics of RPECVD organosilicon polymer post-treatment in a N /O microwave plasma remote afterglow'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Kinetics of RPECVD organosilicon polymer post-treatment in a N /O microwave plasma remote afterglow
Sami Abou Rich, V. Mille, C. Vivien, S. Godey, P. Supiot
Research output: Contribution to journal › Article › peer-review