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Abstract
The study of the growth mechanisms of amorphous hydrogenated carbon coatings (a-CH ) deposited by reactive pulsed magnetron discharge in Ar + C H , Ar + H , and Ar + C H + H low-pressure atmospheres is presented in this work. Hydrogen-containing species of the reactant gas affect the microstructure and surface properties of the a-CH thin films. The dynamic scaling theory has been used to relate the main reactive species involved in the deposition process to the growth mechanisms of the thin film by means of the analysis of the roughness evolution. Anomalous scaling effects have been observed in smooth a-CH coatings. Dynamic scaling exponents α, β, and z indicate a general growth controlled by surface diffusion mechanisms. Hydrogen species have an influence on the lateral growth of the a-CH coatings and are involved in the development of a polymeric-like structure. Meanwhile, hydrocarbon species promote the generation of higher aggregates, which increases the roughness of a more sp clustering structure of the a-CH coating.
Original language | English |
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Pages (from-to) | 12017-12026 |
Number of pages | 10 |
Journal | Journal of Physical Chemistry C: Nanomaterials and interfaces |
Volume | 116 |
Issue number | 22 |
DOIs | |
Publication status | Published - 7 Jun 2012 |
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Dive into the research topics of 'Investigation of the growth mechanisms of a–CHx coatings deposited by pulsed reactive magnetron sputtering'. Together they form a unique fingerprint.Equipment
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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of MaterialsFacility/equipment: Technological Platform
Activities
- 1 Participation in conference
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11th Asian-European International Conference on Plasma Surface Engineering
Stéphane Lucas (Invited Speaker)
11 Sept 2017 → 15 Sept 2017Activity: Participating in or organising an event types › Participation in conference