Investigation of adhesion between molybdenum and polysilazane by XPS

Dodji Amouzou, Lionel Fourdrinier, Robert Sporken

    Research output: Contribution to journalArticlepeer-review

    Abstract

    A study is conducted to investigate the interface between polysilazane (PSZ)coatings and Mo films for understanding adhesion. Two kinds of Mo/PSZ samples are investigated and the chemical environments of their interfaces are compared. Ultra-thin Mo films are deposited on PSZ coatings to probe the interface directly by X-ray photoelectron spectroscopy (XPS) and to avoid long sputtering times in depth profiling of Mo films. The investigations reveal that the sputtered Mo films systematically adhere well to PSZ coatings. The good adhesion arises from a formation of molybdenum oxycarbonitride or molybdenum carbonitride ceramics through covalent bonding between atoms from PSZ and Mo at the interface.

    Original languageEnglish
    Pages (from-to)202-206
    Number of pages5
    JournalApplied Surface Science
    Volume343
    DOIs
    Publication statusPublished - 15 Jul 2015

    Fingerprint

    Dive into the research topics of 'Investigation of adhesion between molybdenum and polysilazane by XPS'. Together they form a unique fingerprint.

    Cite this