Influence of oxygen co-implantation on germanium out-diffusion and nanoclustering in SiO2/Si films

Research output: Contribution to journalArticlepeer-review

54 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Influence of oxygen co-implantation on germanium out-diffusion and nanoclustering in SiO2/Si films'. Together they form a unique fingerprint.

Chemistry

Medicine and Dentistry

Material Science