In situ infrared ellipsometry study of plasma processing of metallic surface

B. DREVILLON, N. BERTRAND, P. BULKIN, Stephane Lucas, S. BENAYOUN

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)362-367
Number of pages6
JournalSurface and Coatings Technology
Volume94/95
Publication statusPublished - 1997

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