Original language | English |
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Pages (from-to) | 362-367 |
Number of pages | 6 |
Journal | Surface and Coatings Technology |
Volume | 94/95 |
Publication status | Published - 1997 |
In situ infrared ellipsometry study of plasma processing of metallic surface
B. DREVILLON, N. BERTRAND, P. BULKIN, Stephane Lucas, S. BENAYOUN
Research output: Contribution to journal › Article