Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality

S.R. KASI, Michael Liehr, Paul Thiry, Hervé DALLAPORTA, Michael OFFENBERG

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Cite this

@article{3803428bb7ed46abbba5e75724480d6b,

title = "Hydrocarbon reaction with HF-cleaned Si(100) and effects on metal-oxide-semiconductor device quality",

author = "S.R. KASI and Michael Liehr and Paul Thiry and Herv{\'e} DALLAPORTA and Michael OFFENBERG",

year = "1991",

language = "English",

volume = "59",

pages = "108--110",

journal = "Applied Physics Letters",

issn = "1077-3118",

publisher = "American Institute of Physics Publising LLC",

number = "1",

}