High resolution electron energy loss spectroscopic characterization of insulators for Si technology

Michael Liehr, Paul Thiry

Research output: Contribution to journal › Article

Original language	French
Pages (from-to)	1013-1032
Number of pages	20
Journal	Journal of Electron Spectroscopy and Related Phenomena
Volume	54/55
Publication status	Published - 1990

Cite this

@article{6e822996532543caa695564f51e42fb7,

title = "High resolution electron energy loss spectroscopic characterization of insulators for Si technology",

author = "Michael Liehr and Paul Thiry",

year = "1990",

language = "Fran{\c c}ais",

volume = "54/55",

pages = "1013--1032",

journal = "Journal of Electron Spectroscopy and Related Phenomena",

issn = "0368-2048",

publisher = "Elsevier",

}