Original language | French |
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Pages (from-to) | 1013-1032 |
Number of pages | 20 |
Journal | Journal of Electron Spectroscopy and Related Phenomena |
Volume | 54/55 |
Publication status | Published - 1990 |
High resolution electron energy loss spectroscopic characterization of insulators for Si technology
Michael Liehr, Paul Thiry
Research output: Contribution to journal › Article