High resolution electron energy loss spectroscopic characterization of insulators for Si technology

Michael Liehr, Paul Thiry

    Research output: Contribution to journalArticle

    Original languageFrench
    Pages (from-to)1013-1032
    Number of pages20
    JournalJournal of Electron Spectroscopy and Related Phenomena
    Volume54/55
    Publication statusPublished - 1990

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