High resolution depth profiling of nitrogen in AlN layers

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	262-266
Number of pages	5
Journal	Nuclear instruments and methods in physics research B
Volume	66
Publication status	Published - 1992

Cite this

@article{3c049f18ba2544f99e5c5cee8b3a0a05,

title = "High resolution depth profiling of nitrogen in AlN layers",

author = "Guy Terwagne and Stephane Lucas and Franz Bodart",

year = "1992",

language = "English",

volume = "66",

pages = "262--266",

journal = "Nuclear Instruments and Methods in Physical Research B",

issn = "0168-583X",

publisher = "Elsevier",

}