High resolution depth profiling of nitrogen in AlN layers

Guy Terwagne, Stephane Lucas, Franz Bodart

Research output: Contribution to journal › Article

Original languageEnglish
Pages (from-to)262-266
Number of pages5
JournalNuclear instruments and methods in physics research B
Volume66
Publication statusPublished - 1992

Cite this

Terwagne, Guy ; Lucas, Stephane ; Bodart, Franz. / High resolution depth profiling of nitrogen in AlN layers. In: Nuclear instruments and methods in physics research B. 1992 ; Vol. 66. pp. 262-266.
@article{3c049f18ba2544f99e5c5cee8b3a0a05,
title = "High resolution depth profiling of nitrogen in AlN layers",
author = "Guy Terwagne and Stephane Lucas and Franz Bodart",
year = "1992",
language = "English",
volume = "66",
pages = "262--266",
journal = "Nuclear Instruments and Methods in Physical Research B",
issn = "0168-583X",
publisher = "Elsevier",

}

Terwagne, G, Lucas, S & Bodart, F 1992, 'High resolution depth profiling of nitrogen in AlN layers', Nuclear instruments and methods in physics research B, vol. 66, pp. 262-266.

High resolution depth profiling of nitrogen in AlN layers. / Terwagne, Guy; Lucas, Stephane; Bodart, Franz.

In: Nuclear instruments and methods in physics research B, Vol. 66, 1992, p. 262-266.

Research output: Contribution to journal › Article

TY - JOUR

T1 - High resolution depth profiling of nitrogen in AlN layers

AU - Terwagne, Guy

AU - Lucas, Stephane

AU - Bodart, Franz

PY - 1992

Y1 - 1992

M3 - Article

VL - 66

SP - 262

EP - 266

JO - Nuclear Instruments and Methods in Physical Research B

JF - Nuclear Instruments and Methods in Physical Research B

SN - 0168-583X

ER -

Terwagne G, Lucas S, Bodart F. High resolution depth profiling of nitrogen in AlN layers. Nuclear instruments and methods in physics research B. 1992;66:262-266.