Abstract
Silicon nanowire (SiNW) arrays were coated with chromium nitride (CrN) for use as supercapacitor electrodes. The CrN layer of different thicknesses was deposited onto SiNWs using bipolar magnetron sputtering method. The areal capacitance of the SiNWs-CrN, as measured in 0.5 M H2SO4 electrolyte, was as high as 180 mF cm-2 at a scan rate of 5 mV s-1 (equivalent to 31.8 mF cm-2 at 1.6 mA cm-2) with an excellent electrochemical retention of 92% over 15 000 cycles. This work paves the way toward using CrN modified 3D SiNWs arrays for micro-supercapacitor application.
Original language | English |
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Article number | 035407 |
Pages (from-to) | 035407 |
Number of pages | 8 |
Journal | Nanotechnology |
Volume | 31 |
Issue number | 3 |
DOIs | |
Publication status | Published - 17 Jan 2020 |
Keywords
- Chromium nitride
- Electrochemical capacitors
- Silicon nanowires
- Transition metal nitrides
- Vapor liquid solid method
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