Growth and Characterization of Chromium Oxynitride Thin Films Prepared Using Reactive Unbalanced Magnetron Sputtering in Presence of Air as Reactive Gas

Said Agouram, Guy Terwagne, Franz Bodart (Collaborator)

    Research output: Contribution in Book/Catalog/Report/Conference proceedingChapter (peer-reviewed)peer-review

    Original languageEnglish
    Title of host publicationMetallic oxynitride thin films by reactive sputtering and related deposition methods: processes, properties and applications
    EditorseBooks Bentham
    Number of pages30
    ISBN (Electronic)978-1-60805-157-4
    Publication statusPublished - 2013

    Cite this