Formation of carbon nitride compounds during successive implantations in copper

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• ELISE (XPS and ToF SIMS)

  Louette, P. (Manager)

  Facility/equipment: Equipment

• Synthesis, Irradiation and Analysis of Materials (SIAM)

  Louette, P. (Manager), Colaux, J. (Manager), Felten, A. (Manager), Tabarrant, T. (Operator), COME, F. (Operator) & Debarsy, P.-L. (Manager)

  Technological Platform Synthesis, Irradiation and Analysis of Materials

  Facility/equipment: Technological Platform