Abstract
Suspended graphene is exposed to different fluorine-containing species produced by a plasma source fed with CF 4 precursor gas. We investigate the fluorination process by selecting two different kinetic energies for the ions striking the graphene surface. The chemical-bonding environment is discussed, and the control of the graphene-fluorination homogeneity is investigated at the individual graphene sheets. The modifications of the electronic and structural properties are examined by scanning photoelectron microscopy, micro-Raman analysis, and scanning electron microscopy. The results are compared with those obtained for supported graphene on copper. Suspended graphene provides a quasi-ideal model for investigating the intrinsic properties of irradiated carbon nano-systems while avoiding damage due to backscattered atoms and recoil due to a supporting substrate. [Figure not available: see fulltext.].
Original language | English |
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Pages (from-to) | 3151-3163 |
Number of pages | 13 |
Journal | Nano Research |
Volume | 10 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2017 |
Keywords
- Raman
- X-ray photoelectron spectroscopy (XPS)
- fluorination
- graphene
- scanning electron microscopy (SEM)
- spectromicroscopy