Fabrication and characterization of CVD-grown graphene based Field-Effect Transistor

W. Wei, G. Deokar, M. Belhaj, D. Mele, E. Pallecchi, E. Pichonat, D. Vignaud, H. Happy

Research output: Contribution in Book/Catalog/Report/Conference proceedingConference contribution

Abstract

In this work, we present both fabrication process and characterization of graphene field-effect transistors. Large scale monolayer graphene was grown by chemical vapor deposition (CVD) on Cu foils and transferred over pre-patterned back-gated devices on Si/SiO2 substrate. Scanning electron microscopy, Raman spectroscopy and Hall effect measurement were used for characterizing graphene quality before and after the transfer. It was found that monolayer graphene with a low defect density and hole mobility up to 3180cm2/Vs at n=1.3·1012 cm-2, could be obtained. For device characterization, devices with different gate length were discussed. We report an intrinsic current gain cut-off frequency (ft ) of 15.5 GHz and maximum oscillation frequency of 12 GHz, deduced from the S-parameters measurements for device with gate length of 100 nm. This study demonstrates the potential of CVD-grown graphene for high speed electronics in combination with a technological process compatible with arbitrary substrates.

Original languageEnglish
Title of host publicationEuropean Microwave Week 2014: Connecting the Future, EuMW 2014 - Conference Proceedings; EuMC 2014: 44th European Microwave Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages367-370
Number of pages4
ISBN (Electronic)9782874870354
DOIs
Publication statusPublished - 15 Dec 2014
Externally publishedYes
Event2014 44th European Microwave Conference, EuMC 2014 - Held as Part of the 17th European Microwave Week, EuMW 2014 - Rome, Italy
Duration: 6 Oct 20149 Oct 2014

Conference

Conference2014 44th European Microwave Conference, EuMC 2014 - Held as Part of the 17th European Microwave Week, EuMW 2014
CountryItaly
CityRome
Period6/10/149/10/14

Keywords

  • CVD
  • Graphene FET
  • radio frequency characterization
  • transfer

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