Evolution of the properties of reactively sputtered zirconium nitrides on silicon substrates

P. VANDEN BRANDE, Stephane Lucas, R. WINAND, L. RENARD, A. WEYMEERSCH

Research output: Contribution in Book/Catalog/Report/Conference proceeding › Conference contribution

Cite this

@inproceedings{8ead6270d2364fe788c98380d02b8c9f,

title = "Evolution of the properties of reactively sputtered zirconium nitrides on silicon substrates",

author = "\{VANDEN BRANDE\}, P. and Stephane Lucas and R. WINAND and L. RENARD and A. WEYMEERSCH",

year = "1994",

language = "English",

volume = "343",

pages = "759--764",

booktitle = "Mater. Res. Soc. Symp. Proc.",

}