Original language | English |
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Title of host publication | Mater. Res. Soc. Symp. Proc. |
Pages | 759-764 |
Number of pages | 6 |
Volume | 343 |
Publication status | Published - 1994 |
Evolution of the properties of reactively sputtered zirconium nitrides on silicon substrates
P. VANDEN BRANDE, Stephane Lucas, R. WINAND, L. RENARD, A. WEYMEERSCH
Research output: Contribution in Book/Catalog/Report/Conference proceeding › Conference contribution