Epitaxial growth of aluminum nitride layers on Si(111) at high temperature and for different thicknesses

Frédéric Malengreau, Marc Vermeersch, Serge Hagège, Robert Sporken, Michael Lange, Roland Caudano

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)175-188
    Number of pages14
    JournalJournal of materials research
    Issue number1
    Publication statusPublished - 1997

    Cite this