Epitaxial growth of aluminum nitride layers on Si(111) at high temperature and for different thicknesses

Frédéric Malengreau, Marc Vermeersch, Serge Hagège, Robert Sporken, Michael Lange, Roland Caudano

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	175-188
Number of pages	14
Journal	Journal of materials research
Volume	12
Issue number	1
Publication status	Published - 1997

Cite this

@article{75792dd1ce254a69b8fd1c14a5287c44,

title = "Epitaxial growth of aluminum nitride layers on Si(111) at high temperature and for different thicknesses",

author = "Fr{\'e}d{\'e}ric Malengreau and Marc Vermeersch and Serge Hag{\`e}ge and Robert Sporken and Michael Lange and Roland Caudano",

note = "Publication code : **RES. ACAD.",

year = "1997",

language = "English",

volume = "12",

pages = "175--188",

journal = "Journal of materials research",

publisher = "Materials Research Society",

number = "1",

}

TY - JOUR

T1 - Epitaxial growth of aluminum nitride layers on Si(111) at high temperature and for different thicknesses

AU - Malengreau, Frédéric

AU - Vermeersch, Marc

AU - Hagège, Serge

AU - Sporken, Robert

AU - Lange, Michael

AU - Caudano, Roland

N1 - Publication code : **RES. ACAD.

PY - 1997

Y1 - 1997

M3 - Article

VL - 12

SP - 175

EP - 188

JO - Journal of materials research

JF - Journal of materials research

IS - 1

ER -