Epitaxial growth of aluminum nitride layers on Si(111) at high temperature and for different thicknesses

Frédéric Malengreau, Marc Vermeersch, Serge Hagège, Robert Sporken, Michael Lange, Roland Caudano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)175-188
Number of pages14
JournalJournal of materials research
Volume12
Issue number1
Publication statusPublished - 1997

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