Direct transfer of the CVD-grown graphene on copper foils on SiO2 substrate under supercritical CO2 assisted-cleaning technique

Trung T. Pham, Quyet H. Do, Thanh K.V. Ngo, Robert Sporken

Research output: Contribution to journalArticle

Abstract

The transfer of CVD-grown graphene sheets onto arbitrary substrates is important for the development of practical applications. Unfortunately, designing a low cost and highly efficient graphene transfer technique to achieve defect-free graphene sheets with low contact resistance onto various substrates still remains a challenge. In this paper, a CVD grown monolayer graphene sheet was directly transferred on SiO2/Si substrate. We found that a combination of floating copper with graphene films on ammonium persulfate solution with an original method of supercritical CO2 fluid can effectively produce clean and dry samples without damaging the crystalline quality of graphene. This method does not require any polymeric material to be desposited on the graphene films at any stage. Samples are analyzed by optical microscopy, Raman spectroscopy, scanning electron microscopy and atomic force microscopy. This method is very promising for cleaning graphene samples for electronic device fabrication.

Original languageEnglish
Pages (from-to)184-190
Number of pages7
JournalMaterials Today Communications
Volume18
DOIs
Publication statusPublished - 1 Mar 2019

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Graphite
Graphene
Metal foil
Copper
Chemical vapor deposition
Cleaning
Substrates
Ammonium persulfate
Supercritical fluids
Contact resistance
Optical microscopy
Raman spectroscopy
Monolayers
Atomic force microscopy
Crystalline materials
Fabrication
Defects
Scanning electron microscopy
Polymers

Cite this

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Direct transfer of the CVD-grown graphene on copper foils on SiO2 substrate under supercritical CO2 assisted-cleaning technique. / Pham, Trung T.; Do, Quyet H.; Ngo, Thanh K.V.; Sporken, Robert.

In: Materials Today Communications, Vol. 18, 01.03.2019, p. 184-190.

Research output: Contribution to journalArticle

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