DFT Modeling of Plasma-Assisted Atomic Layer Deposition for Si(110) Passivation: Formation of Boehmite-Like Chains as γ-Al2O3 Precursors

Andrey A. Rybakov, Alexander V. Larin, Daniel P. Vercauteren, Georgy M. Zhidomirov

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    PAI n°P7/05 - FS2: Functional Supramolecular Systems (FS2)

    CHAMPAGNE, B., De Vos, D., Van der Auweraer, M., Jérôme, C., Lazzaroni, R., Marin, G., Jonas, A., Du Prez, F., Vanderzande, D., Van Tendeloo, G., Van Speybroeck, V., NENON, S. & STAELENS, N.

    1/04/1230/09/17

    Project: Research