DFT Modeling of Plasma-Assisted Atomic Layer Deposition for Si(110) Passivation: Formation of Boehmite-Like Chains as γ-Al2O3 Precursors

Andrey A. Rybakov, Alexander V. Larin, Daniel P. Vercauteren, Georgy M. Zhidomirov

Research output: Contribution to journal › Article › peer-review

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