Depth profiling of carbon and nitrogen in copper using nuclear reactions

Tristan Thome; Julien Colaux; Guy Terwagne

doi:10.1016/j.nimb.2006.04.033

Depth profiling of carbon and nitrogen in copper using nuclear reactions

Tristan Thome, Julien Colaux, Guy Terwagne

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Abstract

Simultaneous implantations of ¹²C and ¹⁵N were performed into copper using the non-deviated beam line of a 2 MV Tandetron accelerator. The atomic composition of the implanted layer was measured using appropriate nuclear reactions with a 1.05 MeV deuteron beam. ¹²C(d,p₀)¹³C and ¹⁵N(d,α₀)¹³C nuclear reactions were used to depth profile simultaneously ¹²C and ¹⁵N and to determine the relative contribution of multi-ionised ¹²C and ¹⁵N ions to the carbon and nitrogen distribution. We also used the narrow resonance at 429 keV of the ¹⁵N(p,αγ)¹²C nuclear reaction to check the validity of our results. The depth distributions obtained with this resonant nuclear reaction confirmed that (d,p) and (d,α) reactions are well suited to profile both carbon and nitrogen elements with a quite good resolution. Moreover, using these reactions makes possible to profile ¹²C and ¹⁵N atoms with a single and relatively rapid measurement.

Original language	English
Pages (from-to)	377-380
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	249
Issue number	1-2
DOIs	https://doi.org/10.1016/j.nimb.2006.04.033
Publication status	Published - 2006

Keywords

α0)13C; 15N(p
αγ)12C
Depth profiling; 15N; NRA; RNRA; 15N(d

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10.1016/j.nimb.2006.04.033

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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform

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@article{e73fdc4cf5384c65bb2d657c66e8435f,

title = "Depth profiling of carbon and nitrogen in copper using nuclear reactions",

abstract = "Simultaneous implantations of 12C and 15N were performed into copper using the non-deviated beam line of a 2 MV Tandetron accelerator. The atomic composition of the implanted layer was measured using appropriate nuclear reactions with a 1.05 MeV deuteron beam. 12C(d,p0)13C and 15N(d,α0)13C nuclear reactions were used to depth profile simultaneously 12C and 15N and to determine the relative contribution of multi-ionised 12C and 15N ions to the carbon and nitrogen distribution. We also used the narrow resonance at 429 keV of the 15N(p,αγ)12C nuclear reaction to check the validity of our results. The depth distributions obtained with this resonant nuclear reaction confirmed that (d,p) and (d,α) reactions are well suited to profile both carbon and nitrogen elements with a quite good resolution. Moreover, using these reactions makes possible to profile 12C and 15N atoms with a single and relatively rapid measurement.",

keywords = "α0)13C; 15N(p, αγ)12C, Depth profiling; 15N; NRA; RNRA; 15N(d",

author = "Tristan Thome and Julien Colaux and Guy Terwagne",

year = "2006",

doi = "10.1016/j.nimb.2006.04.033",

language = "English",

volume = "249",

pages = "377--380",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "1-2",

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TY - JOUR

T1 - Depth profiling of carbon and nitrogen in copper using nuclear reactions

AU - Thome, Tristan

AU - Colaux, Julien

AU - Terwagne, Guy

PY - 2006

Y1 - 2006

N2 - Simultaneous implantations of 12C and 15N were performed into copper using the non-deviated beam line of a 2 MV Tandetron accelerator. The atomic composition of the implanted layer was measured using appropriate nuclear reactions with a 1.05 MeV deuteron beam. 12C(d,p0)13C and 15N(d,α0)13C nuclear reactions were used to depth profile simultaneously 12C and 15N and to determine the relative contribution of multi-ionised 12C and 15N ions to the carbon and nitrogen distribution. We also used the narrow resonance at 429 keV of the 15N(p,αγ)12C nuclear reaction to check the validity of our results. The depth distributions obtained with this resonant nuclear reaction confirmed that (d,p) and (d,α) reactions are well suited to profile both carbon and nitrogen elements with a quite good resolution. Moreover, using these reactions makes possible to profile 12C and 15N atoms with a single and relatively rapid measurement.

AB - Simultaneous implantations of 12C and 15N were performed into copper using the non-deviated beam line of a 2 MV Tandetron accelerator. The atomic composition of the implanted layer was measured using appropriate nuclear reactions with a 1.05 MeV deuteron beam. 12C(d,p0)13C and 15N(d,α0)13C nuclear reactions were used to depth profile simultaneously 12C and 15N and to determine the relative contribution of multi-ionised 12C and 15N ions to the carbon and nitrogen distribution. We also used the narrow resonance at 429 keV of the 15N(p,αγ)12C nuclear reaction to check the validity of our results. The depth distributions obtained with this resonant nuclear reaction confirmed that (d,p) and (d,α) reactions are well suited to profile both carbon and nitrogen elements with a quite good resolution. Moreover, using these reactions makes possible to profile 12C and 15N atoms with a single and relatively rapid measurement.

KW - α0)13C; 15N(p

KW - αγ)12C

KW - Depth profiling; 15N; NRA; RNRA; 15N(d

U2 - 10.1016/j.nimb.2006.04.033

DO - 10.1016/j.nimb.2006.04.033

M3 - Article

SN - 0168-583X

VL - 249

SP - 377

EP - 380

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-2

ER -

Depth profiling of carbon and nitrogen in copper using nuclear reactions

Abstract

Keywords

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Synthesis, Irradiation and Analysis of Materials (SIAM)

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