Depth profiles in nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Marco Jacobs, Franz Bodart

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)113-117
Number of pages5
JournalSurface and Coatings Technology
Volume103-104
Publication statusPublished - 1998

Cite this

@article{bd0763fbf64647498d989b37f24cc5c2,
title = "Depth profiles in nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen",
author = "Marco Jacobs and Franz Bodart",
year = "1998",
language = "English",
volume = "103-104",
pages = "113--117",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",

}

Depth profiles in nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen. / Jacobs, Marco; Bodart, Franz.

In: Surface and Coatings Technology, Vol. 103-104, 1998, p. 113-117.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Depth profiles in nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

AU - Jacobs, Marco

AU - Bodart, Franz

PY - 1998

Y1 - 1998

M3 - Article

VL - 103-104

SP - 113

EP - 117

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

ER -