| Original language | English |
|---|---|
| Pages (from-to) | 113-117 |
| Number of pages | 5 |
| Journal | Surface and Coatings Technology |
| Volume | 103-104 |
| Publication status | Published - 1998 |
Depth profiles in nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen
Marco Jacobs, Franz Bodart
Research output: Contribution to journal › Article