Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

Philippe Roquiny, A. Poulet, Y. Leys, J.-C. Descamps, Franz Bodart, P. Vandenbrande

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)357-362
Number of pages6
JournalThin Solid Films
Volume355-356
Publication statusPublished - 1999

Cite this

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title = "Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates",
author = "Philippe Roquiny and A. Poulet and Y. Leys and J.-C. Descamps and Franz Bodart and P. Vandenbrande",
note = "Publication code : *RES. ACAD.",
year = "1999",
language = "English",
volume = "355-356",
pages = "357--362",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier",

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Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates. / Roquiny, Philippe; Poulet, A.; Leys, Y.; Descamps, J.-C.; Bodart, Franz; Vandenbrande, P.

In: Thin Solid Films, Vol. 355-356, 1999, p. 357-362.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

AU - Roquiny, Philippe

AU - Poulet, A.

AU - Leys, Y.

AU - Descamps, J.-C.

AU - Bodart, Franz

AU - Vandenbrande, P.

N1 - Publication code : *RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

VL - 355-356

SP - 357

EP - 362

JO - Thin Solid Films

JF - Thin Solid Films

SN - 0040-6090

ER -