Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

Philippe Roquiny, A. Poulet, Y. Leys, J.-C. Descamps, Franz Bodart, P. Vandenbrande

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)357-362
Number of pages6
JournalThin Solid Films
Volume355-356
Publication statusPublished - 1999

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