Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

Philippe Roquiny; A. Poulet; Y. Leys; J.-C. Descamps; Franz Bodart; P. Vandenbrande

Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

Philippe Roquiny, A. Poulet, Y. Leys, J.-C. Descamps, Franz Bodart, P. Vandenbrande

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	357-362
Number of pages	6
Journal	Thin Solid Films
Volume	355-356
Publication status	Published - 1999

Cite this

@article{74fbf3bf0fc24a618a479e9087f278fc,

title = "Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates",

author = "Philippe Roquiny and A. Poulet and Y. Leys and J.-C. Descamps and Franz Bodart and P. Vandenbrande",

note = "Publication code : *RES. ACAD.",

year = "1999",

language = "English",

volume = "355-356",

pages = "357--362",

journal = "Thin Solid Films",

publisher = "Elsevier",

}

TY - JOUR

T1 - Comparative study of thin film physical properties for TiN(x) deposited by DC magnetron sputtering under temperatures less than 100°C on monocrystalline silicon and polycristalline iron substrates

AU - Roquiny, Philippe

AU - Poulet, A.

AU - Leys, Y.

AU - Descamps, J.-C.

AU - Bodart, Franz

AU - Vandenbrande, P.

N1 - Publication code : *RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

VL - 355-356

SP - 357

EP - 362

JO - Thin Solid Films

JF - Thin Solid Films

ER -