Colour control of titanium nitride coatings produced by reactive magnetron sputtering at temperature less than 100°C

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Original language	English
Pages (from-to)	278-283
Number of pages	6
Journal	Surface and Coatings Technology
Issue number	116-119
Publication status	Published - 1999

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@article{380a8d3c3840487999b98bd9aa312579,

title = "Colour control of titanium nitride coatings produced by reactive magnetron sputtering at temperature less than 100°C",

author = "Philippe Roquiny and Franz Bodart and Guy Terwagne",

note = "Publication code : **RES. ACAD.",

year = "1999",

language = "English",

pages = "278--283",

journal = "Surface and Coatings Technology",

publisher = "Elsevier",

number = "116-119",

}

TY - JOUR

T1 - Colour control of titanium nitride coatings produced by reactive magnetron sputtering at temperature less than 100°C

AU - Roquiny, Philippe

AU - Bodart, Franz

AU - Terwagne, Guy

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

SP - 278

EP - 283

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 116-119

ER -