Characterization of unbalanced magnetron sputtered Si-Al coatings

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	334-338
Number of pages	5
Journal	"Revue ""le vide : science, technique et applications"""
Volume	284
Publication status	Published - 1997

Cite this

@article{2cad35708298480d8f6f1e57c38b2851,

title = "Characterization of unbalanced magnetron sputtered Si-Al coatings",

author = "Marco Jacobs and Guy Terwagne and Franz Bodart",

year = "1997",

language = "English",

volume = "284",

pages = "334--338",

journal = "{"}Revue {"}{"}le vide : science, technique et applications{"}{"}{"}",

publisher = "Soci{\'e}t{\'e} Fran{\c c}aise du Vide",

}