Characterization of unbalanced magnetron sputtered Si-Al coatings

Marco Jacobs, Guy Terwagne, Franz Bodart

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)334-338
Number of pages5
Journal"Revue ""le vide : science, technique et applications"""
Volume284
Publication statusPublished - 1997

Cite this

@article{2cad35708298480d8f6f1e57c38b2851,
title = "Characterization of unbalanced magnetron sputtered Si-Al coatings",
author = "Marco Jacobs and Guy Terwagne and Franz Bodart",
year = "1997",
language = "English",
volume = "284",
pages = "334--338",
journal = "{"}Revue {"}{"}le vide : science, technique et applications{"}{"}{"}",
issn = "1266-0167",
publisher = "Soci{\'e}t{\'e} Fran{\cc}aise du Vide",

}

Characterization of unbalanced magnetron sputtered Si-Al coatings. / Jacobs, Marco; Terwagne, Guy; Bodart, Franz.

In: "Revue ""le vide : science, technique et applications""", Vol. 284, 1997, p. 334-338.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Characterization of unbalanced magnetron sputtered Si-Al coatings

AU - Jacobs, Marco

AU - Terwagne, Guy

AU - Bodart, Franz

PY - 1997

Y1 - 1997

M3 - Article

VL - 284

SP - 334

EP - 338

JO - "Revue ""le vide : science, technique et applications"""

JF - "Revue ""le vide : science, technique et applications"""

SN - 1266-0167

ER -