Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

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Abstract

This work describes a combined experimental and numerical study of a low pressure argon plasma in a cylindrical magnetron reactor. The plasma properties are first investigated experimentally using optical emission spectroscopy as a function of the position in the reactor and the applied power, for two excitation modes (pulsed direct current and pulsed bipolar) at a constant pressure of 10 Pa. Langmuir probe measurements are also performed to complement the plasma diagnostic. The results are compared with three-dimensional particle-in-cell simulations combined with a Monte Carlo Collision scheme. A consistent agreement occurs between the experimentally measured and numerically calculated electron temperatures, enabling one to validate the numerical model and to explain the influence of the magnetic field on the spatial variations of the electron temperature. The aim of this work is to pave the way for more complex simulations, such as the modeling of a plasma enhanced chemical vapor deposition process. In a future article, we will investigate both experimentally and numerically the plasma polymerization of cyclopropylamine in the same reactor.

Original languageEnglish
Article number031301
Number of pages12
JournalJournal of Vacuum Science and Technology A
Volume37
Issue number3
DOIs
Publication statusPublished - 8 Mar 2019

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Plasma diagnostics
plasma diagnostics
Argon
Electron temperature
low pressure
reactors
argon
Plasmas
Plasma polymerization
Langmuir probes
Optical emission spectroscopy
Plasma enhanced chemical vapor deposition
electron energy
Numerical models
argon plasma
optical emission spectroscopy
electrostatic probes
Magnetic fields
complement
polymerization

Cite this

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title = "Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling",
abstract = "This work describes a combined experimental and numerical study of a low pressure argon plasma in a cylindrical magnetron reactor. The plasma properties are first investigated experimentally using optical emission spectroscopy as a function of the position in the reactor and the applied power, for two excitation modes (pulsed direct current and pulsed bipolar) at a constant pressure of 10 Pa. Langmuir probe measurements are also performed to complement the plasma diagnostic. The results are compared with three-dimensional particle-in-cell simulations combined with a Monte Carlo Collision scheme. A consistent agreement occurs between the experimentally measured and numerically calculated electron temperatures, enabling one to validate the numerical model and to explain the influence of the magnetic field on the spatial variations of the electron temperature. The aim of this work is to pave the way for more complex simulations, such as the modeling of a plasma enhanced chemical vapor deposition process. In a future article, we will investigate both experimentally and numerically the plasma polymerization of cyclopropylamine in the same reactor.",
author = "Stella Mathioudaki and C{\'e}dric Vandenabeele and Romain Tonneau and Andreas Pflug and St{\'e}phane Lucas",
year = "2019",
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T1 - Characterization of a pulsed low pressure argon discharge in a cylindrical magnetron reactor by plasma diagnostic and 3D plasma modeling

AU - Mathioudaki, Stella

AU - Vandenabeele, Cédric

AU - Tonneau, Romain

AU - Pflug, Andreas

AU - Lucas, Stéphane

PY - 2019/3/8

Y1 - 2019/3/8

N2 - This work describes a combined experimental and numerical study of a low pressure argon plasma in a cylindrical magnetron reactor. The plasma properties are first investigated experimentally using optical emission spectroscopy as a function of the position in the reactor and the applied power, for two excitation modes (pulsed direct current and pulsed bipolar) at a constant pressure of 10 Pa. Langmuir probe measurements are also performed to complement the plasma diagnostic. The results are compared with three-dimensional particle-in-cell simulations combined with a Monte Carlo Collision scheme. A consistent agreement occurs between the experimentally measured and numerically calculated electron temperatures, enabling one to validate the numerical model and to explain the influence of the magnetic field on the spatial variations of the electron temperature. The aim of this work is to pave the way for more complex simulations, such as the modeling of a plasma enhanced chemical vapor deposition process. In a future article, we will investigate both experimentally and numerically the plasma polymerization of cyclopropylamine in the same reactor.

AB - This work describes a combined experimental and numerical study of a low pressure argon plasma in a cylindrical magnetron reactor. The plasma properties are first investigated experimentally using optical emission spectroscopy as a function of the position in the reactor and the applied power, for two excitation modes (pulsed direct current and pulsed bipolar) at a constant pressure of 10 Pa. Langmuir probe measurements are also performed to complement the plasma diagnostic. The results are compared with three-dimensional particle-in-cell simulations combined with a Monte Carlo Collision scheme. A consistent agreement occurs between the experimentally measured and numerically calculated electron temperatures, enabling one to validate the numerical model and to explain the influence of the magnetic field on the spatial variations of the electron temperature. The aim of this work is to pave the way for more complex simulations, such as the modeling of a plasma enhanced chemical vapor deposition process. In a future article, we will investigate both experimentally and numerically the plasma polymerization of cyclopropylamine in the same reactor.

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