Characterisation of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Said Agouram, Franz Bodart, Guy Terwagne

    Research output: Contribution to journalArticlepeer-review

    177 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Characterisation of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Physics & Astronomy

    Chemical Compounds