Arsenic deposition as a precursor layer on silicon (211) and (311) surfaces

C Fulk, Robert Sporken, Jacques Dumont, D Zavitz, M Trenary, B Gupta, G Brill, J Dinan, S Sivananthan

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)846-850
    Number of pages5
    JournalJournal of Electronic Materials
    Volume34
    Issue number6
    Publication statusPublished - 2005

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