An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes

Michal Gulas, Costel-Sorin COJOCARU, Francois LE NORMAND, Samir FARHAT

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	123-146
Number of pages	24
Journal	Plasma Chemistry and Plasma Proccesing
Volume	28
Publication status	Published - 2008

Cite this

@article{3eb437c819244885bfd09510cebbdc27,

title = "An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes",

author = "Michal Gulas and Costel-Sorin COJOCARU and {LE NORMAND}, Francois and Samir FARHAT",

year = "2008",

language = "English",

volume = "28",

pages = "123--146",

journal = "Plasma Chemistry and Plasma Proccesing ",

}

TY - JOUR

T1 - An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes

AU - Gulas, Michal

AU - COJOCARU, Costel-Sorin

AU - LE NORMAND, Francois

AU - FARHAT, Samir

PY - 2008

Y1 - 2008

M3 - Article

VL - 28

SP - 123

EP - 146

JO - Plasma Chemistry and Plasma Proccesing

JF - Plasma Chemistry and Plasma Proccesing

ER -