An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes

Michal Gulas, Costel-Sorin COJOCARU, Francois LE NORMAND, Samir FARHAT

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)123-146
Number of pages24
JournalPlasma Chemistry and Plasma Proccesing
Volume28
Publication statusPublished - 2008

Cite this

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title = "An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes",
author = "Michal Gulas and Costel-Sorin COJOCARU and {LE NORMAND}, Francois and Samir FARHAT",
year = "2008",
language = "English",
volume = "28",
pages = "123--146",
journal = "Plasma Chemistry and Plasma Proccesing",

}

An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes. / Gulas, Michal; COJOCARU, Costel-Sorin; LE NORMAND, Francois; FARHAT, Samir.

In: Plasma Chemistry and Plasma Proccesing , Vol. 28, 2008, p. 123-146.

Research output: Contribution to journalArticle

TY - JOUR

T1 - An investigation of the plasma composition in plasma-enhanced hot filament catalytic chemical vapor deposition of carbon nanotubes

AU - Gulas, Michal

AU - COJOCARU, Costel-Sorin

AU - LE NORMAND, Francois

AU - FARHAT, Samir

PY - 2008

Y1 - 2008

M3 - Article

VL - 28

SP - 123

EP - 146

JO - Plasma Chemistry and Plasma Proccesing

JF - Plasma Chemistry and Plasma Proccesing

ER -