An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	1208-1209
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	2
Publication status	Published - 1984

Cite this

@article{162db144be254b588a6de6c375db7df9,

title = "An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds",

author = "Jean-Jacques Pireaux and Jean-Pol Delrue and Paul Thiry and Roland Caudano",

year = "1984",

language = "English",

volume = "2",

pages = "1208--1209",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds

AU - Pireaux, Jean-Jacques

AU - Delrue, Jean-Pol

AU - Thiry, Paul

AU - Caudano, Roland

PY - 1984

Y1 - 1984

M3 - Article

SN - 0734-2101

VL - 2

SP - 1208

EP - 1209

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

ER -