@article{f76fa7f49904450b8e7a22ba346b6d2b,
title = "Advanced characterization of high-k materials: a nuclear approach",
keywords = " Nuclear reaction analysis, Thin film, High-k, Elastic recoil detection, Rutherford backscattering",
author = "B. Brijs and C. Huyghebaert and S. Nauwelaerts and M. Caymax and W. Vandervorst and K. Nakajima and K. Kimura and A. Bergamier and G. D{\"o}llinger and W.N. Lennard and Guy Terwagne and A. Vantomme",
year = "2002",
language = "English",
volume = "190",
pages = "505--509",
journal = "Nuclear Instruments and Methods in Physical Research B",
issn = "0168-583X",
publisher = "Elsevier",
}