Advanced characterization of high-k materials: a nuclear approach

B. Brijs, C. Huyghebaert, S. Nauwelaerts, M. Caymax, W. Vandervorst, K. Nakajima, K. Kimura, A. Bergamier, G. Döllinger, W.N. Lennard, Guy Terwagne, A. Vantomme

    Research output: Contribution to journalArticle

    31 Downloads (Pure)
    Original languageEnglish
    Pages (from-to)505-509
    Number of pages5
    JournalNuclear instruments and methods in physics research
    Volume190
    Publication statusPublished - 2002

    Keywords

    • Nuclear reaction analysis
    • Thin film
    • High-k
    • Elastic recoil detection
    • Rutherford backscattering

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