Abstract
Molybdenum films are investigated on stainless steel substrates coated with polysilazane based sol-gel and SiO layers for flexible CIGS solar cell applications. Thermal stability of the multilayer has been studied. The thickness of polysilazane films are significantly reduced (17%) after heat treatment suggesting a thermal degradation. Four different microstructures were found for Mo films by varying argon total pressure from 2.6 × 10 Pa to 2.6 Pa. It was shown that continuous films, low sheet resistance (0.5 ω/□) and well facetted grains can be achieved when Mo films are deposited on heated substrates at homologous temperature, T of 0.2.
Original language | English |
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Pages (from-to) | 535-540 |
Number of pages | 6 |
Journal | Thin Solid Films |
Volume | 531 |
DOIs | |
Publication status | Published - 1 Jan 2013 |
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Synthesis, Irradiation and Analysis of Materials (SIAM)
Louette, P. (Manager), Colaux, J. (Manager), Felten, A. (Manager), Tabarrant, T. (Operator), COME, F. (Operator) & Debarsy, P.-L. (Manager)
Technological Platform Synthesis, Irradiation and Analysis of MaterialsFacility/equipment: Technological Platform