Abstract
Rutherford backscattering spectrometry (RBS) is a non-destructive thin film analytical technique of the highest absolute accuracy which, when used for elemental depth profiling, depends at first order on the gain of the pulse-height spectrometry system. We show here for the first time how this gain can be reliably and robustly determined at about 0.1%. This journal is
Original language | English |
---|---|
Pages (from-to) | 3096-3104 |
Number of pages | 9 |
Journal | Analytical Methods |
Volume | 7 |
Issue number | 7 |
DOIs | |
Publication status | Published - 7 Apr 2015 |
Externally published | Yes |