A round robin experiment of elemental sensitivity factors in low-energy ion scattering

H.H. Brongersma, M. Carrere-Fontaine, R. Cortenraad, A.W. Denier Van Der Gon, P.J. Scanlon, I. Spolveri, B. Cortigiani, U. Bardi, E. Taglauer, S. Reiter, S. Labich, Patrick Bertrand, L. Houssiau, S. Speller, S. Parascandola, H. Ünlü-Lachnitt, W. Heiland

Research output: Contribution to journalArticlepeer-review

Abstract

In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories. The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within ±20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, CuPd, was determined, using in situ calibration standards. These surface composition measurements agreed within ±3 at% demonstrating that quantitative composition determination is possible using this procedure.
Original languageEnglish
Pages (from-to)377-386
Number of pages10
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume142
Issue number3
Publication statusPublished - 1 Jul 1998

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