Project Details
Description
Infrared spectroscopy is used to characterize, by their vibrational fingerprint, buried Si-H interfaces, after hydrogen implantation of Si wafers.
Status | Finished |
---|---|
Effective start/end date | 1/01/97 → 31/12/02 |
Keywords
- smart cut
- Silicium
- microelectronics
- hydrogen
- IR
- interfaces
- implantation