Vibrational characterization of Hydrogen implanted silicon wafers for SOI (Silicon on Insulator) substrates production by the Smartcut® process

Project: Research

Project Details

Description

Infrared spectroscopy is used to characterize, by their vibrational fingerprint, buried Si-H interfaces, after hydrogen implantation of Si wafers.
StatusFinished
Effective start/end date1/01/9731/12/02

Keywords

  • smart cut
  • Silicium
  • microelectronics
  • hydrogen
  • IR
  • interfaces
  • implantation