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Use of Virtual Coater to model a reactive magnetron sputtering deposition process from gas phase transport to film growth: application to Titanium Oxide deposition
Tonneau, Romain
(PI)
Lucas, Stephane
(Supervisor)
Faculty of Sciences
Namur Institute of Structured Matter
Unite de recherche en analyses par reactions nucleaires
Namur Nanosafety Center
Namur Research Institute for Life Sciences
Project
:
PHD
Overview
Project Details
Status
Finished
Effective start/end date
1/09/13
→
1/09/19
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