Project Details
Description
The relation between the energy deposited by N+ and Ne+ (50 keV) into monocrystalline alumina and the production of defects in the oxgyen or alumina networks can be determined by channeling Rutherford Backscattering (RBS-C) and TEM.
| Status | Finished |
|---|---|
| Effective start/end date | 1/09/91 → 31/08/02 |
Keywords
- Neon
- alumina
- implantation
- monocrystal
- defects
- channeling
- Nitrogen
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