INIS
silica
100%
silicon
100%
concentration
57%
protons
50%
germanium
50%
excitation
50%
energy
50%
trapping
50%
nanocrystals
50%
annealing
33%
nanostructures
25%
signals
21%
comparative evaluations
19%
ion implantation
14%
silicon oxides
14%
images
12%
density
12%
scanning electron microscopy
12%
accumulation
12%
rutherford backscattering spectroscopy
12%
atoms
12%
emission
7%
proton beams
7%
variations
7%
data
7%
kev range
7%
tools
7%
defects
7%
monitoring
7%
matrices
7%
irradiation
7%
transmission
7%
efficiency
7%
range
7%
detection
7%
atmospheres
7%
Material Science
Silicon
100%
Silicon Dioxide
100%
Nanocrystalline Material
75%
Germanium
50%
Annealing
32%
Scanning Electron Microscopy
25%
Nanoclusters
25%
Density
25%
Ion Implantation
14%
Keyphrases
Ge Concentration
50%
Germanium
50%
Low-energy Protons
50%
Si Nanocrystals
50%
Ionoluminescence
50%
Scanning Electron Microscope Image
25%
Bond Density
25%
Fused Silica
10%
Excitation Time
5%
Residual Defect
5%
Signal Intensity
5%
Low Energy Irradiation
5%
Damaging Effects
5%
Excitation Efficiency
5%
Optical Detection
5%
In-situ Monitoring
5%
Ar Atmosphere
5%