Influence of the water vapor concentration into the reactive plasma during the deposition of chromium oxynitrides layers on steel

Project: PHD

Description

Study of the steel protective properties of chromium oxynitrides layers deposited using the DC magnetron reactive sputtering technique where the reactive gases are Argon and Air.
StatusFinished
Effective start/end date31/08/9829/06/02

Keywords

  • chromium
  • air.
  • oxynitride
  • steel
  • reactive sputtering