Characterisation of thin layers of Sialon obtained by nitrogen and oxygen implantation in Si-Al coatings

Project: PHD

Description

Deposition of thin layers of Sialon (neoceramics) obtained by oxygen and nitrogen implantation into substrates like Al-Si (alloys or multilayers) and by DC magnetron plasma deposition. Stoechiometry and impurities of the compound are determined by nuclear
StatusFinished
Effective start/end date1/09/931/04/98

Keywords

  • oxygen
  • aluminium
  • sialon
  • alloys
  • ceramics
  • implantation
  • silicon
  • nitrogen