Project Details
Description
Deposition of thin layers of Sialon (neoceramics) obtained by oxygen and nitrogen implantation into substrates like Al-Si (alloys or multilayers) and by DC magnetron plasma deposition. Stoechiometry and impurities of the compound are determined by nuclear
| Status | Finished |
|---|---|
| Effective start/end date | 1/09/93 → 1/04/98 |
Keywords
- oxygen
- aluminium
- sialon
- alloys
- ceramics
- implantation
- silicon
- nitrogen
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